Abstract
The radiation transport involved in pulsed ultraviolet laser ablation of organic materials has been studied both theoretically and experimentally. A mathematical description of the absorption process that includes nonlinear effects such as chromophore saturation and multiphoton absorption is presented. This theoretical model accurately describes the observed polymer etch depth versus incident laser fluence relationship for various target materials, laser wavelengths, and pulse durations varying from nanoseconds to subpicoseconds. The theoretical analysis can also be used to explain observed nonlinearities in the transmission characteristics of polyimide subjected to intense KrF excimer laser irradiation.
Similar content being viewed by others
References
Y. Kawamura, K. Toyoda, S. Namba: Appl. Phys. Lett. 40, 374 (1982)
R. Srinivasan, V. Mayne-Banton: Appl. Phys. Lett. 41, 576 (1982)
R. Srinivasan: Science 234, 559 (1986)
H.M. Phillips, D.L. Callahan, R. Sauerbrey, G. Szabo, Z. Bor: Appl. Phys. A 54, 158 (1992)
G. Gorodetsky, T.G. Kazyaka, R.L. Melcher, R. Srinivasan: Appl. Phys. Lett. 46, 828 (1985)
R. Srinivasan, B. Braren, D.E. Seeger, R.W. Dreyfus: Macromolecules 19, 916 (1986)
R. Srinivasan, B. Braren, R.W. Dreyfus: J. Appl. Phys. 61, 372 (1987)
H.S. Cole, Y.S. Liu, H.R. Philipp: Appl. Phys. Lett. 48, 76 (1986)
S. Küper, J. Brannon: Conference on Lasers and Electro-Optics (CLEO), Baltimore, MD, Technical Digest Series 10, 506 (1991)
J.H. Brannon, J.R. Lankard, A.I. Baise, F. Burns, J. Kaufman: J. Appl. Phys. 58, 2036 (1985)
E. Sutcliffe, R. Srinivasan: J. Appl. Phys. 60, 3315 (1986)
S. Küper, M. Stuke: Appl. Phys. B 44, 199 (1987)
R.S. Taylor, D.L. Singleton, G. Paraskevopoulos: Appl. Phys. Lett. 50, 1779 (1987)
F.E. Fantes, G.O. Waring: Lasers Surg. Med. 9, 533 (1989)
D.L. Singleton, G. Paraskevopoulos, G.S. Jolly, R.S. Irwin, D.J. McKenney, W.S. Nip, E.M. Farell, L.A. Higginson: Appl. Phys. Lett. 48, 878 (1986)
O. Kermani, H.J. Koort, E. Roth, M.U. Dardenne: J. Cataract Refract. Surg. 14, 638 (1988)
B. Danielzik, N. Fabricius, M. Röwekamp, D. von der Linde: Appl. Phys. Lett. 48, 212 (1986)
B.J. Garrison, R. Srinivasan: Appl. Phys. Lett. 44 (1984)
P. Simon: Appl. Phys. B 48, 253 (1989)
G.D. Mahan, H.S. Cole, Y.S. Liu, H.R. Philipp: Appl. Phys. Lett. 53, 2377 (1988)
S. Lazare, V. Granier: Appl. Phys. Lett. 54, 862 (1989)
T. Keyes, R.H. Clarke, J.M. Isner: J. Phys. Chem. 89, 4194 (1985)
E. Andrew, P.E. Dyer, D. Foster, P.H. Key: Appl. Phys. Lett. 43, 717 (1983)
W.G. McGimpsey, J.C. Scaiano: J. Am. Chem. Soc. 109, 2179 (1987)
J.B. Birks: Photophysics of Aromatic Molecules (Wiley Interscience, New York 1970)
I.B. Berlman: Energy transfer Parameters of Aromatic Compounds (Academic, New York 1973)
C.W. Frank, G.H. Fredrickson, H.G. Andersen: In Photophysical and Photochemical Tools in Polymer Science, ed. by M.A. Winnik, NATO, A SI Series C, Vol. 182, 495 (1985)
D.D. Dlott: J. Opt. Soc. Am. B 7, 1638 (1990)
D. Phillips, A.J. Roberts (eds.) Photophysics of Synthetic Polymers (The Royal Institution, Science Reviews 1982)
R. Sauerbrey, G.H. Pettit: Appl. Phys. Lett. 55, 421 (1989)
J.K. Frisoli, Y. Hefetz, T.F. Deutsch: Quantum Electronics and Laser Science Conference (QELS) Baltimore, MD, Technical Digest Series 12, 62 (1989)
G.H. Pettit, R. Sauerbrey: Appl. Phys. Lett. 58, 793 (1991)
G.H. Pettit, M.N. Ediger, R.P. Weiblinger: To appear in Appl. Opt. (1992)
D.L. Singleton et al.: J. Chem. Phys. (1990)
DuPont technical data
J.P. LaFemina, G. Arjavalingam, G. Hougham: J. Chem. Phys. 90, 5154 (1989)
J.K. Frisoli, Y. Hefertz, T.F. Deutsch: Appl. Phys. B 52, 168 (1991)
F.P. Schäfer (ed.): Dye Lasers, Topics in Applied Physics, 3rd edn. Vol. 1 (Springer, Berlin, Heidelberg 1989) and references therein
S. Küper, M. Stuke: Appl. Phys. Lett. 54, 4 (1989)