Abstract
Operating parameters of powerful UV and vacuum ultraviolet (VUV) excilamps with different discharge geometry excited by capacitive discharge, barrier discharge, glow discharge, and UV-preionized discharge were investigated. Intense radiation of Ar2*, Kr2*, Xe2*, ArF*, KrBr*, KrCl*, KrF*, XeI*, Cl2, XeBr*, XeCl*, XeF* molecules and I* atoms was obtained in rare gas or in rare gasF2 (Br2, CH3Br, Cl2, Br2, HCl, I2, NF3) mixtures.
Conference
International Symposium on Plasma Chemistry, International Symposium on Plasma Chemistry, ISPC, Plasma Chemistry, 15th, Orléans, France, 2001-07-09–2001-07-13
Published Online: 2009-01-01
Published in Print: 2002-01-01
© 2013 Walter de Gruyter GmbH, Berlin/Boston
